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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 158-180 doi: 10.1007/s11465-017-0455-9

Abstract:

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracyThe conception, applications and history of ultra-precision machining are introduced in this article,and the developments of ultra-precision machining technologies, especially ultra-precision grinding,ultra-precision cutting and polishing are also reviewed.

Keywords： ultra-precision grinding     ultra-precision cutting     ultra-precision polishing     research status in China     development    

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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 77-88 doi: 10.1007/s11465-017-0411-8

Abstract: However, these materials are difficult to machine through traditional machining methods because of theirIn this article, the characteristics and machining difficulties of soft-brittle and crystals are presentedMoreover, the latest research progress of novel machining technologies and their applications for soft-brittle

Keywords： brittle     soft     functional crystal     ultra-precision machining    

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 89-98 doi: 10.1007/s11465-017-0412-7

Abstract: Damages such as surface micro-crack and subsurface damage often occur during machining of hard and brittleUltra-precision machining is widely used in processing hard and brittle materials to obtain nanoscalemachining quality.This paper provides a review of present research on the molecular dynamics simulation of ultra-precisionmachining of hard and brittle materials.

Keywords： MD simulation     ultra-precision machining     hard and brittle materials     machining mechanism     review    

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Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

Jiang Zhuangde, Li Changsheng , Sun Lin, Duan Duanzhi, Kang Chengwei ,Chen Shanshan, Lin Qijing, Yang Shuming

Strategic Study of CAE 2023, Volume 25, Issue 1,   Pages 131-141 doi: 10.15302/J-SSCAE-2023.07.003

Abstract: Researching the ultra-precision machining technology and equipment for high-end optical elementsIn this study, the ultra-precision machining methods and equipment for optical elements, high-performancebasic components, and measurement methods and equipment used in ultra-precision optical machining shape and performance, compounding of machining technologies, integration of machining and measurementThrough extensive survey and discussions, a technology roadmap for ultra-precision manufacturing of high-end

Keywords： optical element     precision manufacturing     ultra-precision machine tool     ultra-precision machining     optical    

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Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 1-2 doi: 10.1007/s11465-017-0445-y

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

Frontiers of Mechanical Engineering 2009, Volume 4, Issue 1,   Pages 64-70 doi: 10.1007/s11465-009-0009-x

Abstract: elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision

Keywords： dynamics analysis     air-bearing     linear stage     reduction    

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Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 4,   Pages 400-407 doi: 10.1007/s11465-008-0060-z

Abstract: Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress

Keywords： manufacture     different     interaction     air-bearings     response amplitude    

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Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2,   Pages 158-163 doi: 10.1007/s11465-008-0031-4

Abstract: This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precisionMeanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zeroThe results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision

Keywords： post-yield     linear-motor     advanced sliding     pre-yield     position    

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2,   Pages 119-132 doi: 10.1007/s11465-008-0034-1

Abstract: of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precisionmachining, micro-robotics, biomedical engineering and other fields urgently need the support of modernprecision driving theory and technology.This paper presents the development of piezoelectric precision driving technology at home and abroadparts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision

Keywords： Electromagnetic     ultra-precision processing     technology     piezoelectric     cumbrous    

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Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 193-202 doi: 10.1007/s11465-017-0448-8

Abstract: The most common method of manufacturing half-meter KDP crystals is ultra-precision fly cutting.When processing KDP crystals by ultra-precision fly cutting, the dynamic characteristics of the fly cuttingThese machining errors should be suppressed effectively to guarantee that KDP crystals meet the full-bandmachining accuracy specified in the evaluation index.this study, the anisotropic machinability of KDP crystals and the causes of typical surface errors in ultra-precision

Keywords： ultra-precision fly cutting     large-aperture KDP crystals     spatial frequency     processing error    

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Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 3,   Pages 350-355 doi: 10.1007/s11465-007-0061-3

Abstract: nano scale surface roughness, indicating the potential of super abrasive diamond wheels in ductile machining

Keywords： ELID     peripheral     electrolytic in-process     nickel-electroplated monolayer     measurement    

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Self-generation of machining precision and its realization in lapping of super precision solid balls

ZHANG Bopeng

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 3,   Pages 348-353 doi: 10.1007/s11465-008-0065-7

Abstract: This paper presents the principle of self-generation of machining precision by explaining its basic conceptThe self-generation of machining precision for solid balls with super precision is emphatically explainedNecessary conditions for achieving self-generation of machining precision are given.Establishment of the system for machining solid balls with super precision is discussed.Self-generation of machining precision for solid balls with super precision on the basis of the capability

Keywords： self-generation     necessary     self-regulation capability     viewpoint     Necessary    

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Coupling evaluation for material removal and thermal control on precision milling machine tools

Frontiers of Mechanical Engineering 2022, Volume 17, Issue 1,   Pages 12-12 doi: 10.1007/s11465-021-0668-9

Abstract: Machine tools are one of the most representative machining systems in manufacturing.In pursuit of energy-efficient, high-precision machining, more attention should be paid to the energyExperimental study indicates that TC is the main energy-consuming process of the precision milling machineThis paper reveals the coupling effect of MR and TC on energy efficiency and machining accuracy.It can provide a foundation for energy-efficient, high-precision machining of machine tools.

Keywords： machine tools     cutting energy efficiency     thermal stability     machining accuracy     coupling evaluation    

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Micro-optical fabrication by ultraprecision diamond machining and precision molding

Hui LI, Likai LI, Neil J. NAPLES, Jeffrey W. ROBLEE, Allen Y. YI

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 181-192 doi: 10.1007/s11465-017-0444-z

Abstract:

Ultraprecision diamond machining and high volume molding for affordable high precision high performanceIn this process, first high precision microoptical molds are fabricated using ultraprecision single pointdiamond machining followed by high volume production methods such as compression or injection moldingIn this paper, first ultraprecision machine design and machining processes such as slow tool and fastTo implement precision optical manufacturing by molding, numerical modeling can be included in the future

Keywords： ultraprecision machining     slow tool servo     fast tool servo     compression molding     injection molding     microlens    

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Theoretical and experimental analysis on super precision grinding of monocrystal silicon

GUO Xiaoguang, GUO Dongming, KANG Renke, JIN Zhuji

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 2,   Pages 137-143 doi: 10.1007/s11465-007-0023-9

Abstract: simulation is very effective and reliable, and successful to fulfill the investigation on nanometric machining

Keywords： machining mechanism     recovery     advancement     mechanism     subsurface    

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Title Author Date Type Operation

Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

Journal Article

Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

Journal Article

Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

Journal Article

Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

Jiang Zhuangde, Li Changsheng , Sun Lin, Duan Duanzhi, Kang Chengwei ,Chen Shanshan, Lin Qijing, Yang Shuming

Journal Article

Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

Journal Article

Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

Journal Article

Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

Journal Article

Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

Journal Article

Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

Journal Article

Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

Journal Article

Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

Journal Article

Self-generation of machining precision and its realization in lapping of super precision solid balls

ZHANG Bopeng

Journal Article

Coupling evaluation for material removal and thermal control on precision milling machine tools

Journal Article

Micro-optical fabrication by ultraprecision diamond machining and precision molding

Hui LI, Likai LI, Neil J. NAPLES, Jeffrey W. ROBLEE, Allen Y. YI

Journal Article

Theoretical and experimental analysis on super precision grinding of monocrystal silicon

GUO Xiaoguang, GUO Dongming, KANG Renke, JIN Zhuji

Journal Article